As microchips become smaller, the shrinking size of their copper interconnects leads to increased electrical resistivity at the nanoscale. Finding a solution to this technical bottleneck is a problem ...
San Jose, California – November 3, 2009 – Novellus Systems (NASDAQ: NVLS) announced today that it has developed a new tungsten deposition process, called LRWxT, that can effectively reduce contact and ...
The measured resistivity of epitaxial tungsten layers with (001) and (011) crystal orientation vs thickness d. The tungsten Fermi surface is color coded according to the wave vector dependent Fermi ...
WASHINGTON, D.C., October 4, 2017 -- As microchips become ever smaller and therefore faster, the shrinking size of their copper interconnects leads to increased electrical resistivity at the nanoscale ...
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